Design and Simulation of Asymmetric MOSFETs

A novel asymmetric MOSFET with no LDD on the source side is simulated on bulk-Si using a device simulator (SILVACO). In order to overcome the problems of the conventional asymmetric process, a novel asymmetric MOSFET using mesa structure and sidewall spacer gate is proposed which provides self-alignment process, aggressive scaling, and uniformity. First of all, we have simulated to compare the characteristics between asymmetric and symmetric MOSFETs. Basically, both asymmetric and symmetric MOSFETs have an n-type channel (25-nm) and the same physical parameters. When we compare this with the 25-nm symmetric MOSFET, the proposed asymmetric MOSFET shows better device performances. key words: asymmetric MOSFET, LDD, mesa structure, sidewall spacer gate